特征
Latest Technology and Highest Performance
The dynamic wide measurement range; 0.01- 5000 microns (up to 3000 microns for wet method)
The LA-960 incorporates the previous strengths over a broader range of sizes. 3 dimensional data simulation which generates scattered light patterns for HORIBA original optical layout are used for the calculation.
The results can be compared with the theoretical results including all the optical component parameter effects. The comparison allows for the selection of the best approach of the size and distributions. Certified samples as small as 20 nm can be handled by the new algorithms.
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