【IC697MDL350】【IC697MDL350】

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I/O模块的外部接线
　　开关量输入、输出模块的外部接线分为汇点式、分组汇点式和分离式三种，汇点式的各输入回路有—个公共端COM，并共用—个电源（直流电源一般是PLC自带）；分组汇点式由几个电源供电，分离式各个输入输出回路由单独电源供电，后5种输入、输出模块的交流或直流电源一般由用户提供。

　　输入端或输出端有电感性元件时，对于直流电路，应在它们两端并联续流二极管；对于交流电路，应在它们两端并联阻容电路，以抑制电路断开时产生的电弧对PLC的影响（右图）。电阻可取50～120Ω，电容可取0.1～0.47mf，电容的额定电压应大干电源峰值电压。续流二极管可以选1A的管子，其额定电压应大于电源电压的3倍。

：张亮（工程师）    专线：
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Affinity Chiller PNE-H20L-ED36CBCO

2 Dainippon SEPC-0065 TU controller, 2-VC-13234

Advanced energy 2026-000-D, ASM LDM PLASMA Generator

Novellus 30-121470-02 Ring, electromagnet assembly

2 Leybold TurboTronik NT 340M, 340 M/I turbo pump controller

Lot of 2  Novellus 02-120820-00 Porter Assembly, DEGAS, Integrated LDS,

Techware PAL-00386, Cluster module controller 16 Dig I/O, 32 AI/O, 32 Relay I/O

Techware PAL-00525, Cluster module controller 16 Dig I/O, 32 AI/O, 32 Relay I/O

Techware PAL-00356, Cluster module controller 16 Dig I/O, 48 AI/O, 32 Relay I/O

Brooks CLMC-JA, Cluster module controller 16 Dig I/O, 32 AI/O, 32 Relay I/O

2 AMAT 0020-30629, chucks, looks , very clean

BOC Edward Seiko Seiki STP-H2002C, STP turbo pump control unit, STPH2002C

Ebara ET300W, Turbo pump controller, AET08-4391, very clean, 303W REM01 PWM-15M

Berkeley Process Controls USA4-35-70, 950607, Bam controllers USA4-35-70

Equipe ESC 210 Robot Controller

AE RFPP LF-5 RF Generator and RFPP ATL-100RA RF Match

 Berkeley process USA-2-22-35, 950608, Multi axis servo amplifiers BAM

2  Horiba Stec MFC, SEC-7440M, 5 SLM, O2 gas, mass flow controller

3 Motorla MVME 147-012 PCB, VME module 84-W8964B01B

Nikon objective lens CF Plan 5X/0.13 TI

2  Brooks 017-0344-01, End effector, Robot blade, fiber optics, vector

AMAT 0010-09750 RF match, CVD, P5000, module mfg.3kv, 13.56 Mhz

8  Tylan FC-261 N2, H2, O2

10 Brooks handler calibration wafer test, 200mm, semitool 90006-11, 

AVIZA 604387-03 Heated manifold TEA SAT

Nordson 1065804A 6 kW Microwave Lamp Head UV cure, Novellus 63-285050-00

MRC RF matching network A118144 For MRC Eclipse Star tool

Berkeley Process Controls TS-3200-BR Monitor IPEC Speedfam Novellus 966041

 MKS 655AD2N Pressure controller, manual MKS 600

Kinetics Thermal systems RC152ZLAM Chiller, 

ASTEX applied science ABX-X355 0037 1873 SA, RF generator controller, PCB board

2  AMAT 0040-06896 TXZ Chamber CVD Lid Plates

2 AMAT 0010-09180 CVD CHAMBER WAFER LIFT ASSEMBLY

Lot of 2 Leybold NT 341 M , Turbotronic turbo pump controller

1D10-102521-12, Shield, Depo, Upper-Y, looks /ceramic coated, very clean

2 LAM 716-011036-001 Ring Filler, orifice, alumnia

3 MKS baratron 124A-11848, 2000 TORR, S 8263A

6 STEC MFC SEC-4400M, CL2, O2, SiF4, 

6 STEC MFC SEC-4400M, NH3, CF4, CHF3, 

5 IPEC Speedfam Novellus 952363, Entegris Q4000 Ball valve

TREK 684-1, 6 phase ESC Power supply, Novellus R19-137359-00

4  Linear actuator 400MM rail two long NP105, 95086-52

2  Novellus 94-34505-60 PCB board, I/O genus, 1569-04

Ipec Speedfam Novellus 959084 Lot of 2 Brushless Servomotors

Berkeley Process Controls ASM121-A-0/B-22-NB/10, AC Brushless Servo Motor

2 AMAT 0190-35791 MUXADIO-001 Seriplex multiplexed ADIO boards

2 Kollmorgen MT1506B1-E2C1 Servomotor, goldline series, Ipec novvelus 968601

Lot of 7  in box, OPTO 22 G4RD remote digital 16 channel brainboard, Mistic

SMC XGT310-30-1A-X2, Actuator, L-motion gate valve, looks rebuilt, sell as 

Affinity Chiller  FWA-032K-DD01CAM1

VAT 14038-PE24-AIU1/0012 HV Gate valve, 14038-PE24-AIU1

Parker 6K4, 0125-112454, 4 Axis servo stepper motor drive controller

Brooks 002-5860-01, Card, Theta Driver, Brooks, ATR7, Novellus 27-155081-00

VAT 20040-UE24-ABD2, Valve, VAT, 6"CF, EXT Body, Novellus R60-154308-00

AMAT 0020-10520, 125mm, pedestal thick

7  Todd products SC24-11C, power supplies, 115/230VAC 6A/3A w/ paper work

 Novellus 150-000-057, 950827 Drive assy w ASM81-B & Brecoflex T10/980 belt

Brooks Module Controller 002-5870-05, I/O Assembly 002-4674-09

SVG 879-0262-001 Shutter interlock control PCB 859-0727-010E

AMAT 0010-00006 RF RACK Control panel, back mount RF generator rack

ASTeX ABX-X348 ETO driver board water cooled

4  AMAT 3700-02105 Chemraz SC513, 10.484 x .139

 TEC ASM 000-71002700-00, PCB, TEC 68356 D 45877

Advanced Motion Controls 30A20-ACT Brush Type PWM Servo Amplifier,  in Box

6  Fluorosilicone 19.33 x 1.39 Oring, Blue, 70, 22-373624-00

ENI LPG-6 pwer supply RF generator, output impedence LPG-6T ENI

PCB Board OPTO22 LC4 001836L 94V-0, OPTO 22 EX2 001840D

IPEC 2850-739459, GENMARK S08R.11 Wafer transfer robot controller

ETEC systems LENS control 756-4350-01, ASSYMBLY 756-4350, FAB 756-4351-01