【IC697MSC802】【IC697MSC802】

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顺序功能图（SFC）
    顺序功能图，亦称功能流程图或状态转移图，是一种图形化的功能性说明语言，于描述工业顺序控制程序，也是IEC61131-3的标准编程语言。使用它可以对具有并发、选择等复杂结构的系统进行编程，一些高档的PLC提供了用于SFC编程的指令，但一些低档的PLC并不支持SFC编程语言。顺序功能图示例如图3所示。 
    顺序功能图主要由“状态"和“转移"等基本元素组成。通过这些基本元素的不同组合，可以表达各种各样的复杂顺序控制逻辑，控制规律的表达简洁明了。 

：张亮（工程师）    专线：
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Horiba STEC SEF-Z514MGX H2 5 slm Mass Flow Meter Kit, ASM PN: 1002-477-04

 Celerity/Unit UFC-8161 H2 500 sccm Mass Flow Controller MFC ASM 54-123498A31

National Instruments SCXI-1125 8-Channel Amplifier Card

Pfeiffer Balzers TPH 110 Turbo Molecular Vacuum Pump

 Thermo Blue M/Lindberg GO1300A Gravity Convection Economy Oven 1 cu. ft.

 ASM 56-106565A41 Heater-Inline-1.5 Dia, 200VAC, 96W, 170C, MKS PN: 9615-1133

Fisher ABgene AB-0384 Plate Combi Thermo-Sealer PCR/Mic

 MKS 892B-26616 Micro-Baratron Pressure Transducer, ASM PN: 65-106645A96

HP/Agilent 6613C DC Bench Power Supply 50V, 1 A, 50 W

Clean Air Products 24" x 23.75" x 24" Cleanroom Pass Thru Air Lock CAP18 Series

 ASM PN: 42-122970A38 Power Supply-42VDC 6A Unregulated (42 VDC 6 A)

Alotek/Consolidated Electronics SM6-0 Circuit Breaker Gas Density Monitor SF6

Qty. 39:  Canon BG9-4886-000-000 Reticle Cassettes/Holders 5" Cassette?

 MKS 223BD-00010AAB 10 Torr Baratron Pressure Transducer Kit ASM 04-323738A01

Olin 775 I/O LDTC Temperature Controller MAT Bubbler

 Horiba STEC SEF-Z514MGX H2 5/10 slm Mass Flow Meter, ASM PN: 49-125310A11

 Motortronics CSD-410-N Variable Frequency AC Motor Drive ASM PN:54-106931A32

 Lam Research PN: 839-024453-100 Wldmt Weldment VAC Line Clamp G/Cooling

 ASM PN: 130003650 Controlled Air Intake RC Kit for A412 Furnace

4:  AMAT 4020-00008 Disposable Filter .2μm Pore Kit

Kanomax Climomaster 6511 Thermo-Anemometer & 6807 Probe

Zellweger Solomat MP Surveyor IAQ Indoor Quality Air Monitoring System MN:PIAQE

 Kenwood Texio PSR20-18M Regulated DC Power Supply

 Kenwood Texio PSR20-18MY3 DC Regulated Power Supply

Nova-Scan NovaScan Illumination Lamp Assembly For 420/210/3000?

Unaxis/Oerlikon PN: 102179091 Chamber Shield Ti, Au

Unaxis/Oerlikon PN: 102161354 Adjustable Etch Shield

AMAT Applied Materials 0021-21234 Upper Shield

RCA / Burle 4665 UHF Pulsed Power Tube (1215 MHz 65kW)

Leybold Heraeus Quick-Test 89600-2 Sniffer 89600B2

Control Laser/Holobeam QS-109H Q-Switch YAG Laser Head QS-109-H

SVG/ASML 854-0138-001 Assembly 854-1613-001B/001A

BOC Edwards 1050 Range Multiplier Controller W10500000

Advanced Energy Sparc-le DC Pulsing Arc System (MDX)

BOC Edwards Bellows Sealed Pressure Relief Valve Kit

Chemwest CPD7-D FM4910 Cleanroom Storage Cabinet

MKS 621B02TBFH Baratron Manometer Capacitance Gauge + Signal Conditioner 2 Torr

 ASM 2914670-001 !!Retro Kit, PSU10,20,32 A412

 VAT 01032-KE01 Mini UHV KF40 ISO Vacuum Gate Valve, ASM PN: 50-125108A14

Endevco 2258A-10 Triaxial Piezoelectric Accelerometer

Kniel CL 15.8 Linearly Regulated Power Supply 120 W, ASML PN: 4022.436.7932

 ASM PN: 03-323114A01, Gespac GESADC-112, ADC-12A, GESPCB-334 Circuit Board