1100℃双管三温区管式炉（石墨烯生长）- GSL-1100X-III-D11-8
GSL-1100X-III-D11-8 is adual tube & three zone tube furnace with 11" + 8.5" O.D two quartz tubes, vacuum flanges & valves snd vacuum gauge for immediate use. Three 30 segments programmable controllers are built in with K type thermal couple. Microprocessor-based PID control provides excellent control without overshooting and +/- 1 ºC accuracy. This new furence is used for growwing graphene film on metallic foil which is wrapped on the wall of inside tube.

Dual quartz tube structure	· High purity quart tube · Outside tube Size: 279 O.D x 269 I.D x 1300mm Length (11" O.D x 10.6" I.D x 48" L), two end opened and connected flange · Inside tube size : 216 OD x 206 IDx 750 mm Length (8.5"OD x 8.1"ID x30"L), one end closed and connected to gas inlet and outlet. · Please click picture below to see dual tubes anf flange set-up ·
Furnace structure	· Double layer steel casing with air cooling. Surface temperature of case is < 70°C. · Refractory fibrous alumina insulation liner for maximum energy saving. · Heating element: NiCrAl Resistance Wire · Two quartz block are included to blco heat radiation · If take inside tube out is furnace also can be used as annealing or diffusion furnace for 8" wafer use a quartz boat at related product below ·
Heating zone	Total heating zone length 900 mm (36") Three zones: 300 mm + 300 mm + 300mm (12" per zone) Constant temperature zone: 500 mm (if three zones are in the same temperature)
Working temperature	Max heating temperature: 1100°C ( < 1 hour ) Normal working temperature: 200~1000°C Max heating & cooling rate: 10°C/min Temperature uniformity: please click the pic to enlarge
Temperature control	· Three digital controllers with PID/self-tuning functions and 30 segments programmable. · Thermocouple: three K type thermocouples (one for each zone) Control accuracy: +/- 1°C · SRC (Silicon Controlled Rectifier) power control · Software for PC control is available as optional
Vacuum sealing & Flange	· A pair of stainless steel vacuum sealing flange with high temp-resistance silicon O-ring which can achieve the vacuum rate of 10^-2 torr via heavy duty mechanical pump. · Left Side Flange: CVD gas Inlet port and cooling gas in&out port are included · Right Side Flange: KF40 vacuum port with KF-40 Vacuum Right-Angle Valve for easy connection to KF40 bellows and pump. ( If use pump with KF25 port, you will need a adapter KF40-KF25.
Rated Voltage	Single Phase, 220V AC, 50/60 Hz AWG 8# Power cord is included (without plug)
Power consumption	Max. 8KW (50A breaker required)
Product Dimension	1300 L x 623 W x 940 H mm (51" L x 24.5" W x 37" H) (without the vacuum flange) 1670 L x 623 W x 940 H mm (66" L x 24.5" W x 37" H) (with the vacuum flange and right angle valve)
Net weight	200kg
Shipping dimension	70" x 70" x 65"
Shipping weight	500Lbs (227kg)
Warranty	One year limited warranty for electrical parts. ( Consumable parts such as processing tubes, o-rings and quartz tube are not covered by the warranty) You may order replacment quartz tube at the link below
Certificate	(click to view the authorized document)
国家砖利	砖利名称：一种真空管式炉 砖利编号：ZL-2011-2-0102249.4 尊重**、鄙视抄袭、侵权必究
NOTE	In order to obtain accurate temperature inside tube furnace, you need to calibrate temperature before use, please click here to learn How to set up ceramic tube and vacuum flange for MTI Tube furnace