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Gas Concentration Monitor, IR-150

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产品简介

Gas Concentration Monitor, IR-150

详细介绍

概要
規格

概要

HORIBA has used its gas analysis technology and cleaning process experience to develop a new gas concentration monitor. HORIBA has honed its knowledge over many years through the development and production of chemical solution concentration monitors such as those used for SC-1 and SC-2 monitors, mass flow controllers, and a variety of fluid supply systems. The gas concentration monitor completes HORIBA's process control lineup, making it possible for the company to offer total process solutions that meet all our customers needs.

特征

Inline installation for real-time measurement.
Compact space-saving design allowing for easy integration.
Suitable for monitoring concentration in a variety of cleaning equipment, and drying processes.

規格

Type of gas measured		Please consult HORIBA
Measurement principle		Non-dispersive infrared method (NDIR method)
Measurement range^*1		0 to 5%
Repeatability		±2% F. S.
Gas cell optical path length		5 mm
Response time		T90: 7 seconds or less
Gas cell pressure resistance		1.0 MPa (G)
Sample gas flow rate^*2		1 L/min
Sample gas temperature^*2		Room temperature
Sample gas pressure^*2		Atmospheric pressure
Wetted materials		SUS316L, sapphire, Ag
Leak rate		5 x 10^-12 Pa·m³/s
Piping junction		1/4 inch VCR male
Analog output		DC 4 to 20 mA
Contact output		3 alarm channels,
		including ERR, High, and Low alarms
Contact input		1 channel for use in zero calibration
Display		0.000 to 5.000%
Power supply		DC 24 V, 30 W (max.)
Installation environment temperature		20 to 25°C
External dimensions	Sensor unit	153.5 x 37.5 x 107 mm (6.0 x 1.5 x 4.2 in.)
(W x D x H)	Control unit	96 x 130 x 48 mm (3.8 x 5.1 x 1.9 in.)
Mass	Sensor unit	About 1.0 kg, 2.2 lb
	Control unit	About 0.5 kg, 1.1 lb