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X射线波带片

详细介绍

具有25nm分辨率的波带片的SEM图像

X-Ray波带片

高质量的X射线光学系统，具有经过验证的分辨率、效率和可靠性、低成本，适用于ptychography、STXM、TXM和相位对比成像的软X射线和硬X射线。

优势

利用不同的金属（金或镍）可以提高一系列能量的效率。该图为从ANT波带片软件生成的图像。

高分辨率波带片可在大范围的能量范围内提供的分辨率和效率。18 nm（Δr）分辨率的波带片提供高分辨率，水窗效率高于20％。18 nm Au FZP图像，直径270μm，中心光阑设计。

Applied Nanotool的波带片可用于各种应用，包括大直径的ptychography和几毫米的<1 nm缝合误差。直径为0.85毫米的波带片图像

高相位对比成像，适用于分辨率为50 nm及以下的硬X射线应用。波带片的均匀性是高相位衬度成像的关键组成部份。

软X-Ray指标

低于5keV(<0.25nm)的X射线通常被归类为软X射线，该射线比高能X射线更容易被吸收。通常，波带片不需要相同的厚度效率，并且允许更高分辨率成像。软/细X射线的一系列波带板选项可满足特定要求。

Device	Outer Zone Width ΔR _n(nm)	Thickness (µm)	Outer Diameter (µm)	(# of zones) E/ΔE Limit	~ Focal Length (µm)	Estimated Lead Time
NZP-50um-12nm	12	0.05 + 0.01	50	1059	144	Please Contact
NZP-65um-15nm	15	0.05 + 0.01	65	1096	235	Please Contact
SZP‑90um‑15nm	15	<0.1	90	1514	325	2-3
SZP‑120um‑15nm	15	<0.1	120	2019	433	2-3
SZP‑200um‑18nm	18	<0.15	200	2797	868	In Stock
SZP‑270um‑18nm			270	3775	1172
SZP‑320um‑18nm			320	4473	1389
SZP-200um-25nm	25	<0.24	200	2007	1207	In Stock
SZP‑250um‑25nm			250	2509	1510
SZP-300um-25nm			300	3010	1811
SZP-360um-25nm			360	3612	2173
TZP‑160um‑50nm	50	<0.75	160	801	1934	2 – 3
TZP‑280um‑50nm	50	<0.75	280	1401	3384	2 – 3
TZP‑750um‑200nm	200	<0.75	750	938	36292	1 – 3
TZP‑1250um‑200nm	200	<0.75	1250	1563	60487	1 – 3
*For estimated efficiency of zone plate, please see generated graphs below or download our zone plate software.

硬X-Ray指标

高于5-10keV的X射线从柔弱转变为硬X射线，在那里它们能够更好地穿透样品以提供更好的成像。硬X射线菲涅耳波带片需要高纵横比功能，以便为5 keV以上的能量提供足够的效率和分辨率。我们目前的光学系统可根据所需的能量为亚25 nm – 100 nm成像提供超高分辨率。堆叠硬X射线（通过双重处理或芯片对准）可以显着提高我们设备的效率。硬X射线的波带片选项范围可用于特定要求。

Device	Outer Zone Width ΔR _n(nm)	Thickness (µm)	Outer Diameter (µm)	(# of zones) E/ΔE Limit	Energy Range (keV)	Estimated Lead Time (months)
HZP-50-25nm	25	>0.65	50	500	1.5 to 10	2 – 3
HZP-75-25nm	25	>0.65	75	750	1.5 to 10	2 – 3
HZP‑100um‑42.5nm	42.5	>0.8	100	588	2 to 12	2 – 3
HZP‑85um‑50nm	50	>0.9	85	425	2 to 12	2 – 3
HZPX‑85um‑50nm		>1.7	85	425	5.5 to 20	4 – 6
HZP‑180um‑50nm		>0.9	180	900	2 to 12	2 – 3
HZP‑550um‑50nm		>0.9	550	2750	2 to 12	2 – 3
HZPX‑550um‑50nm		>1.5	550	2750	5.5 to 20	4 – 6
HZP-400um-100nm	100	>1.2	400	1000	2.5 to 8	2 – 3
HZPX‑400um‑100nm	100	>2.6	400	1000	8 to 30	4 – 6
HZP‑400um‑120nm	120	>1.5	400	834	5 to 25	2 – 3
HZPX‑400um‑120nm	120	>2.6	400	834	8 to 30	4 – 5
HZP‑750um‑200nm	200	>2.2	750	938	7 to 20	3 – 4
HZPX‑750um‑200nm	200	>3.6	750	938	12 to 50	4 – 5
*For estimated efficiency of zone plate, please see generated graphs below or download our zone plate software. All zone plate diameters can be customized for specific setups. Standard frame sizes are 3 mm x 3 mm with SiN membranes (100 nm).

Oxide Interlock process for Hard X-Ray Optics

Zone plate efficiency for binary zone plates requires high aspect ratio structures which can survive high flux imaging systems. The “Oxide Interlock" option creates small interconnecting channels between metal zone of silicon dioxide which is transparent to hard X-rays and does not swell or distort, even when not under vacuum. These have been shown to significantly increase the zone plate efficiency and lifetime.

Oxide Interlock process with silicon dioxide links between the gold zones, improving performance and lifetime of the zone plate optics. This comes standard on all hard X-ray optics. The silicon dioxide is highly transparent for hard X-rays.

中心光阑

中心光阑和外光阑选项可以显著改善波带板成像，降低光学器件的0次级并提高其使用寿命。各种厚度可达3μm的芯片可用或大于10μm作为单独的芯片。高分辨率18 nm外区菲涅耳波带片顶部电镀4μm厚中心止点

4 um thick central stop electroplated on top of Fresnel zone plate with high resolution 18 nm outer zones

Custom Designs and Frame Size

Custom designs and frame sizes can be developed for specific applications. We are able to fabricate devices down to 0.1 mm and below. Our standard frame sizes are 5 mm x 5 mm and membrane thickness can be down to 50 nm while the 100 nm thickness is ideal for energies above 5 keV. We also offer silicon carbide membranes for those requiring long-lifetime membranes.

Custom silicon nitride, silicon carbide or silicon membranes down to 0.9 mm half dimensions. Image above showing 1 cm x 1 cm (top), 5 mm x 5 mm (bottom left) and 0.9 mm x 5 mm chips.

XY Stage for Zone Plates/Central Stop Alignment

Our custom XY stage allows micro-scale alignment of a central stop and zone plate and also allows for a possible blast-shield to be mounted.

XY micrometer scale stage holder for central stop and zone plate alignment with blast shield

波带片计算器

Applied Nanotools offers a free online zone plate calculating theoretical efficiencies and for calculating Fresnel zone plates parameters. Please see this link to visit the webpage: Zone Plate Calculator. For the legacy software please download here (note, this version is being replaced with the new website version).