AX7685 ASTRON®ex反应性气体发生器

ASTRON®ex反应性气体发生器是我们产量的独立式反应性气体源，用于室清洗和其他反应性气体应用。ASTRONex反应气体发生器采用的低场环形等离子体技术，有效地分离输入气体，产生下游反应化学物质。的高功率设计有效地分离替代气体，如C3、F8和CF4
． 增加的流动能力为这些替代工艺气体的经济高效使用提供了足够的反应气体产量。与其他等离子体生成技术相比，ASTRONex反应气体发生器效率更高，拥有成本更低，能够从NF3、C3、F8、CF4和其他气体中产生高流量。该设计架构集电源、控制为一体
模块，与等离子体室合并成一个紧凑的模块。由于界面简单，ASTRONex反应气体发生器可以轻松集成到新的和现有的生产工具中。
ASTRONex反应气体发生器的主要应用是作为反应气体的远程来源，使用替代气体清洁工艺室内壁上的沉积物;或者需要高通量的反应物。通过产生氟原子与腔室中的沉积物发生反应，形成新的气体，这些气体很容易被擦洗，以限度地减少对环境的影响。此外，与原位射频方法相比，等离子体源的远程位置减少了对工艺室的磨损。

The ASTRON®ex reactive gas generator is our highest output, self-contained reactive species source for chamber cleaning and other reactive gas applications. The ASTRONex reactive gas generator uses patented Low-Field-Toroidal plasma technology to efficiently dissociate input gas to produce downstream reactive chemistries. The unique high power design effectively dissociates alternative gases such as C3 F8 and CF4
. The increased flow capability provides sufficient reactive gas production for cost-effective use of these alternative process gases. Relative to other plasma generating technologies, the ASTRONex reactive gas generator is more efficient, has lower cost of ownership and is capable of producing high flows from NF3 , C3 F8 , CF4 , and other gases. The design architecture integrates the power source, control
module, and plasma chamber into a single compact module. Due to its simple interface, the ASTRONex reactive gas generator is easily integrated onto both new and existing production tools.
The primary application for the ASTRONex reactive gas generator is as a remote source of reactive gas to clean deposits from interior walls of process chambers using alternative gases; or where high fluxes of a reactant species are required. By generating atomic fluorine that reacts with deposits in the chamber, new gases are formed that are easily scrubbed to minimize the environmental impact. In addition, the remote location of the plasma source reduces wear and tear on the process chamber compared to in situ RF methods.